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外延片超聲波清洗機設備的組成介紹

作者：admin來源：http://www.heqingliang.cn/時間：2023-10-09

外延片構成：

Epitaxial wafer composition:

外延片指的是在襯底上生長出的半導體薄膜,薄膜主要由P型、量子阱、N型三個部分構成。

Epitaxial film refers to a semiconductor thin film grown on a substrate, which is mainly composed of three parts: P-type, quantum well, and N-type.

外延片需要清洗嗎：

Do epitaxial wafers need to be cleaned

外延片在測量阻值之前需要進行清洗，常用的清洗工藝步驟包括：清洗、甩干，然后測量。

The epitaxial film needs to be cleaned before measuring the resistance value, and the commonly used cleaning process steps include: cleaning, drying, and then measuring.

外延片屬于半導體行業，半導體材料在制備過程中，每一道工序都涉及到清洗，而且清洗的好壞直接影響下一道工序，甚至影響器件的成品率。

Epitaxial wafers belong to the semiconductor industry. During the preparation process of semiconductor materials, each process involves cleaning, and the quality of cleaning directly affects the next process, and even affects the yield of devices.

VGT-1509FH超聲波清洗機：

VGT-1509FH Ultrasonic Cleaning Machine:

外延片清洗用到的清洗機配置得有溢流槽與干燥槽。威固特VGT-1509FH超聲波清洗機共有15個功能槽，配置有循環過濾系統、浸泡系統、自動恒溫系統、溢流系統、拋動系統、超聲波清洗系統、慢拉脫水系統、熱風烘干系統等。其中清洗部分與慢拉熱風干燥部份分別獨立電器控制，設備采用環保型有機溶劑洗滌、水溶劑清洗、純水漂洗、慢拉脫水熱風烘干，為環保型清洗機。

The cleaning machine used for cleaning epitaxial wafers is equipped with overflow slots and drying slots. The VGT-1509FH ultrasonic cleaning machine has a total of 15 functional tanks, equipped with a circulating filtration system, soaking system, automatic constant temperature system, overflow system, throwing system, ultrasonic cleaning system, slow pulling dehydration system, hot air drying system, etc. The cleaning part and the slow pulling hot air drying part are independently controlled by electrical appliances. The equipment adopts environmentally friendly organic solvent washing, water solvent washing, pure water rinsing, and slow pulling dehydration hot air drying, making it an environmentally friendly cleaning machine.

超聲波清洗是基于空化作用，即在清洗液中無數氣泡快速形成并迅速內爆。氣泡是在液體中施加高頻（超聲頻率）、高強度的聲波而產生的。因此，任何超聲清洗系統都必須具備三個基本元件：盛放清洗液的槽、將電能轉化為機械能的換能器以及產生高頻電信號的超聲波發生器。

Ultrasonic cleaning is based on cavitation, where countless bubbles rapidly form and implode in the cleaning solution. Bubbles are generated by applying high-frequency (ultrasonic frequency) and high-strength sound waves in liquids. Therefore, any ultrasonic cleaning system must have three basic components: a tank to hold cleaning fluid, a transducer to convert electrical energy into mechanical energy, and an ultrasonic generator to generate high-frequency electrical signals.

清洗設備的能力為3-8分鐘（可調）清洗一籃。

The cleaning equipment has a capacity of 3-8 minutes (adjustable) to clean one basket.

VGT-1509FH超聲波清洗機配置：

VGT-1509FH Ultrasonic Cleaning Machine Configuration:

超聲水劑清洗槽：

Ultrasonic water cleaning tank:

1、每槽設四面溢流口，溢水槽寬35mm，各槽均為獨立循環槽，由循環泵將洗劑由儲液箱抽出經過濾后再運回清洗槽，即子目槽循環。

1. Each tank is equipped with four overflow ports, with a width of 35mm. Each tank is an independent circulating tank, and the detergent is extracted from the storage tank by a circulating pump, filtered, and then transported back to the cleaning tank, which is a sub tank for circulation.

2、設置獨立循環過濾系統。

2. Set up an independent circulating filtration system.

3、配置第四代超聲波發生器，從根本上保證超聲波到有效轉換率，保證超聲波效果并保證超聲波發生器質量到穩定性。

3. Configure the fourth generation ultrasonic generator to fundamentally ensure the effective conversion rate from ultrasonic to ultrasonic, ensure the ultrasonic effect, and ensure the quality and stability of the ultrasonic generator.

4、超聲波發生器內設單片機，內附特有到定時系統，可根據生產需要任意調整清洗時間并形成一對一的設置，定時更具靈活性，保證清洗到一致性。

4. The ultrasonic generator is equipped with a microcontroller and a unique timing system, which can adjust the cleaning time according to production needs and form a one-on-one setting. The timing is more flexible, ensuring consistency in cleaning.

5、儲液箱的設置是由隔板分成兩腔，分油后的清潔溶液經循環泵重新抽入清洗槽，實現自我循環，提高溶液到利用率，而分離后到油排放到總排管。

5. The setting of the liquid storage tank is divided into two chambers by a partition, and the cleaning solution after oil separation is re pumped into the cleaning tank through a circulation pump to achieve self circulation and improve the utilization rate of the solution. After separation, the oil is discharged into the main discharge pipe.

超聲回用純水漂洗槽：

Ultrasonic Reuse Pure Water Rinsing Tank:

1、設置獨立槽。

1. Set up independent slots.

2、槽底部設排液閥。

2. A drain valve is installed at the bottom of the tank.

3、槽外設置拋動。

3. Set up throwing outside the groove.

4、設有加熱系統。

4. Equipped with a heating system.

慢拉脫水槽：

Slow pull off sink:

1、槽體設齒狀溢流結構，純水由純水預熱箱進入。槽外貼保溫棉厚10mm。

1. The tank body is equipped with a toothed overflow structure, and pure water enters through the pure water preheating box. Apply insulation cotton with a thickness of 10mm outside the groove.

2、槽體設“OMRON”數顯溫控系統，檢測槽內工作溫度，溫控范圍：常溫-120℃。

2. The tank body is equipped with an "OMRON" digital temperature control system to detect the working temperature inside the tank, with a temperature control range of -120 ℃.

3、槽體上部設抽風小孔，將溢出水蒸汽抽走，防止水氣再次附著于提出到產品上。

3. The upper part of the tank is equipped with ventilation holes to extract the overflowing water vapor and prevent it from adhering to the product again.

4、在烘干槽頂部加設FFU系統，有效減少環境對洗凈效果到影響。（工件加溫后，對灰塵的附著力增強，FFU形成負壓可有效減少環境對洗凈效果到影響，從而根本上提高產品合格率）。

4. Add an FFU system at the top of the drying tank to effectively reduce the impact of the environment on the cleaning effect. After heating the workpiece, the adhesion to dust is enhanced, and the negative pressure formed by FFU can effectively reduce the impact of the environment on the cleaning effect, thereby fundamentally improving the product qualification rate.

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